Electrostatic chuck with improved release

... principle described with reference to FIGS. 22 to 25, and so electric charges remaining on the attracting areas corresponding to the electrodes are eliminated when the DC power supplies are turned off. In ether words, the electrostatic ...

In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a ...

A Coulombic electrostatic chuck is disclosed which includes a substrate, a conductive layer overlying the substrate, and an arc elimination layer overlying the conductive layer. The electrostatic chuck further includes ...

An electrostatic chuck includes an ESC electrode E 1 that is disc-shaped in plan view, an ESC electrode E 2 that is doughnut-shaped in plan view, and a dielectric layer formed to cover surfaces of the ESC electrodes E 1 and E 2 .

... electrostatic chuck. The electrostatic chuck of the present invention includes an electrode part including first and second electrodes having different polarities and generating electrostatic charge for fixing a wafer, an electric ...

Electrostatic chucks and methods of forming the chucks are disclosed. The chucks include ceramic materials directly bonded with a layer of active braze alloy. The active alloy operates as both a conductive layer of the electrostatic ...

A method and apparatus for discharging a residual charge from an electrostatic chuck having one or more electrodes. The discharge process involves exposing a surface of the electrostatic chuck to energetic particles such as photons.

In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a ...

An electrostatic chuck 20 for holding a substrate 12 comprises a dielectric 70 having a receiving surface 75 for receiving the substrate thereon. The dielectric 70 comprises a charging electrode 80 for generating electrostatic charge ...

An electrostatic chuck includes dielectric layer having at least one region, an electrode associated with the at least one region, and an AC power source configured to provide an AC voltage signal to the electrode.

Although not wishing to be bound by any particular theory, it is believed that the intergranular phase, such as yttria aluminate, is effective to increase the charge carriers present within the crystal lattice of the aluminum nitride ...

Although, these process waste products are not considered principle contaminants, the cumulative buildup, after repeated processing and maintenance cycles, of these and all other contaminants with the conductive contaminant film, ...

Embodiments of the present invention provide a cost effective electrostatic chuck assembly capable of operating over a wide temperature range in an ultra-high vacuum environment while minimizing thermo-mechanical stresses within the ...

Electrostatic chucks are used to hold substrates in various applications, including for example, holding a silicon wafer in a process chamber during semiconductor fabrication. A typical electrostatic chuck comprises an electrode covered by ...

An electrostatic chuck 15 for chucking and supporting a work 20 made of an electrical insulating material includes a chuck body having a positive electrode 12 a and a negative electrode 12 b formed therein to which ...

An aluminum electrostatic chuck for holding semiconductor wafers during wafer processing. The chuck is characterized by a closely determined magnitude of electrostatic holding force due to an anodization step for creating a finely ...

A method for manufacturing an electrostatic chuck is disclosed wherein a sintered ceramic body having a dielectric layer made from Alumina (Al2O2) and Titanium Nitride (TiN) having a ...

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