Handbook of Thin Film Deposition

Published on: 2018-02-23
Page Count: 470 pages
Print Type: BOOK
Maturity Rating: NOT_MATURE
Language: en
Embeddable: Yes
PDF Available: Yes
EPUB Available: Yes
ISBN-13: 9780128123126
ISBN-10: 0128123125
... flash manufacturing Flash memory scaling. IEDMMRS Bull, 814À817. Puurenen RL. Surface chemistry of atomic layer deposition: a case study for the trimethylaluminum/ water process. J Appl Phys 2005;97:121301. Khurana N, Jackson M, Zhang Z ...

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